Preparation of Ferroelectric Films with Different Thicknesses and Research on the Performance of 15 nm Hf0.5Zr0.5O2 Ferroelectric Field 

XIAO Jinpan, YUAN Xiaobo, LIU Zongfang, LEE Choonghyun, ZHAO Yi

Technology of IoT&AI ›› 2024, Vol. 56 ›› Issue (2) : 29-37.

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PDF(2348 KB)
Technology of IoT&AI ›› 2024, Vol. 56 ›› Issue (2) : 29-37.

Preparation of Ferroelectric Films with Different Thicknesses and Research on the Performance of 15 nm Hf0.5Zr0.5O2 Ferroelectric Field 

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 56(2): 29-37

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