Research on Infrared Optical Path Self-Calibration Technology for Wafer Defect Detection

SHEN Jinhui, LIU Xiang’an

Technology of IoT&AI ›› 2026, Vol. 58 ›› Issue (9) : 122-125.

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PDF(1340 KB)
Technology of IoT&AI ›› 2026, Vol. 58 ›› Issue (9) : 122-125.

Research on Infrared Optical Path Self-Calibration Technology for Wafer Defect Detection

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2026, 58(9): 122-125

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