不同厚度铁电薄膜的制备及15 nm Hf0.5Zr0.5O2铁电晶体管性能研究#br#
肖金盼, 袁晓博, 刘宗芳, LEE Choonghyun, 赵 毅
Preparation of Ferroelectric Films with Different Thicknesses and Research on the Performance of 15 nm Hf0.5Zr0.5O2 Ferroelectric Field
XIAO Jinpan, YUAN Xiaobo, LIU Zongfang, LEE Choonghyun, ZHAO Yi
智能物联技术
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2024, (2): 29
-37
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